Nitride develops the first UV LED for semiconductor process exposure system

- Jun 16, 2020-

According to foreign media reports, Japan's Nitride Semiconductors has developed a UV LED chip with a wavelength of 365nm and claims to be the first ultraviolet light source used in semiconductor and PCB exposure systems.

It is reported that the exposure system used in the semiconductor manufacturing process still uses ultraviolet mercury lamps, which has functional limitations such as long standby time, short working life, low stability of ultraviolet light, and inconvenient switch control. In addition, due to environmental pollution issues, it is expected that the implementation of the Minamata Convention will promote LED light sources to accelerate the replacement of mercury-containing light sources.

Nitride Semiconductors said that the new NS365L-9RXT UV LED chip with a wavelength of 365nm has the characteristics of high efficiency, energy saving and long life. Under the condition of a forward current If of 3A and a forward voltage of Vf of 4.6V, the UV output power is 3.2 W. At the same time, this UV LED has a very compact structure, with dimensions of 9mm (length) x 9mm (width) x 8.5mm (height), so the mounting density is higher.

The new UV LED also has a narrow emission angle suitable for semiconductor exposure. Normally, in order to achieve precise exposure in semiconductor manufacturing processes, parallel light is required. However, because the UV LED light source has a relatively wide light emission angle (about 120°), the amount of light obtained for exposure is often insufficient. Therefore, by combining a deep mirror and a high-transmittance lens, the company achieved a luminous angle of 15° or less. This shows that it is possible for UV LEDs to directly replace the UV light sources used in traditional exposure systems without the need to purchase new UV LED exposure systems. (Compiled by LEDinside Janice)